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XPS Study of Chemical Interactions in Ion-Implanted Silica Glasses

Published online by Cambridge University Press:  25 February 2011

Renzo Bertoncello ,
A. Glisenti ,
G. Granozzi ,
G. Battaglin ,
E. Cattaruzza  and
P. Mazzoldi
Renzo Bertoncello
Affiliation:
Dipartimento di Chimica Inorganica, Metallorganica ed Analitica, Università di Padova, via Loredan 4, 35131-Padova, Italy
A. Glisenti
Affiliation:
Dipartimento di Chimica Inorganica, Metallorganica ed Analitica, Università di Padova, via Loredan 4, 35131-Padova, Italy
G. Granozzi
Affiliation:
Dipartimento di Chimica Inorganica, Metallorganica ed Analitica, Università di Padova, via Loredan 4, 35131-Padova, Italy
G. Battaglin
Affiliation:
Dipartimento di Chimica Fisica, Università di Venezia, Calle Larga Santa Marta 2137, 30123-Venezia, Italy
E. Cattaruzza
Affiliation:
Dipartimento di Fisica, Università di Padova, via Marzolo 8, 35131-Padova, Italy
P. Mazzoldi
Affiliation:
Dipartimento di Fisica, Università di Padova, via Marzolo 8, 35131-Padova, Italy
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Abstract

An almost unexplored research field of the ion implantation processes is related to chemical modifications induced in a target by chemically reactive ions. This kind of chemistry is somewhat similar to the “hot atom” chemistry, where chemical transformations are produced by recoil atoms originating from nuclear reactions or radiative decay. XPS technique can provide unique informations on the chemical modifications produced by such processes. XPS results will be reported on silica glasses implanted with titanium, silver and tungsten ions in a dose range from l×1016 to 5×1016 ions cm−2, at energies ranging from 15 keV to few hundreds of keV. Most of samples were also subjected to a second implant with N ions. Radiation damage and chemical effects have been discriminated. Chemical compound formation as well as precipitation of the implanted species have been observed. Interestingly, evidences for reactions between chemical species obtained by the first implant and nitrogen (subsequently implanted) will be reported.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 268: Symposium K – Materials Modification by Energetic Atoms and Ions , 1992 , 325
Copyright
Copyright © Materials Research Society 1992

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