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Surface Modification of Soda Glass by Recoil Ion Implantation of In2O3.

Published online by Cambridge University Press:  25 February 2011

K. C. Cadien  and
B. B. Harbison
K. C. Cadien
Affiliation:
Materials Engineering Department, Rensselaer Polytechnic Institute, Troy, NY 12181.
B. B. Harbison
Affiliation:
Materials Engineering Department, Rensselaer Polytechnic Institute, Troy, NY 12181.
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Abstract

Recoil ion implantation of In2O3 into soda glass substrates has been investigated. Increased adhesion results, while the optical and electrical properties are altered. Large energy deposition rates can lead to the reduction of the oxide, thus decreasing visible transmission. Thermal annealing in air results in the recovery of optical and electrical properties. The influence of ion energy and dose on the modification of the glass has been examined.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 45: Symposium A – Ion Beam Processes in Advanced Electronic Materials and Device Technology , 1985 , 217
Copyright
Copyright © Materials Research Society 1985

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