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Published online by Cambridge University Press: 28 February 2011
The electric resistance was measured in real time during laser evaporation deposition of superconducting thin films. It was found that different substrates led to different behaviors in the temporal change of the resistance. The results are consistent with the processes of nucleation, interface reaction and bulk‐like growth. Structural transformation was also observed due to oxygen backfilling at the final stage of the deposition.