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Published online by Cambridge University Press: 28 February 2011
Angular variation of x‐ray fluorescence due to oxygen atoms in high‐T Y‐Ba‐Cu‐O thin films is measured for the first time by using a new parallel plate avalanche chamber. This technique allows the possibility of nondestructive probing of the depth‐profile of oxygen atoms in the superconducting materials. Our preliminary results indicate that the near surface region of the Y‐Ba‐Cu‐O film may contain an oxygen‐depleted layer of thickness around 20 nm.