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Produiion of a-Si1-x Cx:H powders using radiofrequency glow discharges of silane and methane mixtures.

Published online by Cambridge University Press:  10 February 2011

J. Costa ,
G. Viera ,
R. Q. Zhang ,
J. L. Andújar ,
E. Pascual  and
E. Bertran
J. Costa
Affiliation:
Departament de Física Aplicada i Electrònica. Universitat de Barcelona. Av. Diagonal, 647. E08028 Barcelona (Catalonia). Spain.
G. Viera
Affiliation:
Departament de Física Aplicada i Electrònica. Universitat de Barcelona. Av. Diagonal, 647. E08028 Barcelona (Catalonia). Spain.
R. Q. Zhang
Affiliation:
Departament de Física Aplicada i Electrònica. Universitat de Barcelona. Av. Diagonal, 647. E08028 Barcelona (Catalonia). Spain.
J. L. Andújar
Affiliation:
Departament de Física Aplicada i Electrònica. Universitat de Barcelona. Av. Diagonal, 647. E08028 Barcelona (Catalonia). Spain.
E. Pascual
Affiliation:
Departament de Física Aplicada i Electrònica. Universitat de Barcelona. Av. Diagonal, 647. E08028 Barcelona (Catalonia). Spain.
E. Bertran
Affiliation:
Departament de Física Aplicada i Electrònica. Universitat de Barcelona. Av. Diagonal, 647. E08028 Barcelona (Catalonia). Spain.
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Abstract

a-Si1-x Cx:H powders have been produced in radiofrequency glow discharges of SiH4 and CH4. Samples produced in discharges with different gas flow ratios (R=[CH4] / [SiH4]+[CH4], R ∼ 0.2 to 0.95) were analyzed by several techniques: Infrared spectroscopy, transmission electron microscopy and thermal desorption spectrometry of hydrogen. The microstructural properties of the a-Si1-x Cx:H powders obtained ranged between those previously reported in silicon particles and those of amorphous carbon particles. As a general rule, the particles, whose diameter ranged between 5 and 400 nm in diameter, showed an amorphous microstructure and high hydrogen content. Infrared spectroscopy showed that the hydrogen was mainly located on the particle surface and in microvoids forming CHi and/or SiHi (i=2,3) groups.

The hydrogen was removed from the powder by thermal annealing (< 700°C) under vacuum. Anlysis of the a-Si1-x Cx:H powders after this thermal treatment revealed new microstructural and optical features.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 410: Symposium S – Covalent Ceramics III-Science and Technology of Non-Oxides , 1995 , 173
Copyright
Copyright © Materials Research Society 1996

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