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Polycrystalline Silicon as a Mechanical Material

Published online by Cambridge University Press:  21 February 2011

Richard S. Muller
Richard S. Muller*
Affiliation:
Berkeley Sensor & Actuator Center, Electrical Engineering Dept., University of California, Berkeley, CA 94720
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Abstract

In 1982, Kurt Petersen published “Silicon as a Mechanical Material” in the Proceedings of the IEEE. This thorough review article heightened focus on the advantages of utilizing the mechanical as well as electrical properties of single-crystal silicon. Processes for shaping single-crystal silicon based upon selective etching were shown in the article to make silicon useful for a variety of miniature mechanical devices.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 182: Symposium C – Polysilicon Thin Films and Interfaces , 1990 , 245
Copyright
Copyright © Materials Research Society 1990

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References

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