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Nanofabrication of Planar High Temperature Superconducting Josephson Junctions Using Focused Ion Beam Technology

Published online by Cambridge University Press:  17 March 2011

Hong-Ying Zhai ,
Quark Y. Chen ,
Jiarui Liu  and
Wei-Kan Chu
Hong-Ying Zhai
Affiliation:
Now in Solid State Division, Oak Ridge National Laboratory, P. O. Box 2008, Bldg. 3150 Oak Ridge, TN 37831-6056
Quark Y. Chen
Affiliation:
Department of Physics and Texas Center for Superconductivity, University of Houston, 3201 Cullen Blvd., Houston, TX 77204
Jiarui Liu
Affiliation:
Department of Physics and Texas Center for Superconductivity, University of Houston, 3201 Cullen Blvd., Houston, TX 77204
Wei-Kan Chu
Affiliation:
Department of Physics and Texas Center for Superconductivity, University of Houston, 3201 Cullen Blvd., Houston, TX 77204
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Abstract

Superconductor-normal metal-superconductor (SNS) high-Tc Josephson junctions have been fabricated on c-oriented YBa2Cu3O7-δ (YBCO) films. Focused ion beam (FIB) nano-structure modification (cutting of the film and local deposition of a metal) was used to form the junction with tungsten barrier. The junctions exhibit resistively shunted junction (RSJ) -like I-V characteristics.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 636: Symposium D – Nonlithographic and Lithographic Methods of Nanofabrication-From Ultralarge Scale , 2000 , D5.8.1
Copyright
Copyright © Materials Research Society 2001

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