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Fabrication Technologies of Field Emitter Arrays

Published online by Cambridge University Press:  10 February 2011

J. H. Choi ,
Y. S. Ryu ,
J. H. Kang ,
J. E. Jang ,
J. M. Kim ,
J. P. Hong ,
D. Y. Lim  and
V. Michine
J. H. Choi
Affiliation:
Materials sector, Display Materials Lab, Samsung Advanced Institute of Technology, P.O. Box 11, Suwon, Korea 440–600, [email protected]
Y. S. Ryu
Affiliation:
Materials sector, Display Materials Lab, Samsung Advanced Institute of Technology, P.O. Box 11, Suwon, Korea 440–600, [email protected]
J. H. Kang
Affiliation:
Materials sector, Display Materials Lab, Samsung Advanced Institute of Technology, P.O. Box 11, Suwon, Korea 440–600, [email protected]
J. E. Jang
Affiliation:
Materials sector, Display Materials Lab, Samsung Advanced Institute of Technology, P.O. Box 11, Suwon, Korea 440–600, [email protected]
J. M. Kim
Affiliation:
Materials sector, Display Materials Lab, Samsung Advanced Institute of Technology, P.O. Box 11, Suwon, Korea 440–600, [email protected]
J. P. Hong
Affiliation:
Materials sector, Display Materials Lab, Samsung Advanced Institute of Technology, P.O. Box 11, Suwon, Korea 440–600, [email protected]
D. Y. Lim
Affiliation:
Materials sector, Display Materials Lab, Samsung Advanced Institute of Technology, P.O. Box 11, Suwon, Korea 440–600, [email protected]
V. Michine
Affiliation:
Materials sector, Display Materials Lab, Samsung Advanced Institute of Technology, P.O. Box 11, Suwon, Korea 440–600, [email protected]
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Abstract

Total internal reflection (TIR) holographic lithography is studied as a new method for field emitter array (FEA) fabrication. Four basic parameters of the process - scan speed, laser power, focus distance and step distance, are analyzed to optimize the hole patterns. In addition, the characteristics of the Aluminum (Al) parting layer are studied to minimize the stress produced by Molybdenum (Mo) layer during Spindt-type tip formation process.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 471: Symposium G – Flat Panel Display Materials III , 1997 , 211
Copyright
Copyright © Materials Research Society 1997

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References

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