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Characterization of Hollow-Cathode DC Discharge Growth of Diamond: Rotational Vibronic Emission In A CH4-H2 Discharge

Published online by Cambridge University Press:  26 February 2011

H. N. Chu ,
A. R. Lefkow ,
E. A. Den Hartog ,
J. Jacobs ,
P. Sandstrom ,
L. W. Anderson ,
M. G. Lagally  and
J. E. Lawler
H. N. Chu
Affiliation:
University of Wisconsin-Madison, ERC for Plasma-Aided Manufacturing
A. R. Lefkow
Affiliation:
University of Wisconsin-Madison, ERC for Plasma-Aided Manufacturing
E. A. Den Hartog
Affiliation:
University of Wisconsin-Madison, ERC for Plasma-Aided Manufacturing
J. Jacobs
Affiliation:
University of Wisconsin-Madison, ERC for Plasma-Aided Manufacturing
P. Sandstrom
Affiliation:
University of Wisconsin-Madison, ERC for Plasma-Aided Manufacturing
L. W. Anderson
Affiliation:
University of Wisconsin-Madison, ERC for Plasma-Aided Manufacturing
M. G. Lagally
Affiliation:
University of Wisconsin-Madison, ERC for Plasma-Aided Manufacturing
J. E. Lawler
Affiliation:
University of Wisconsin-Madison, ERC for Plasma-Aided Manufacturing
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Abstract

Experiments to study the temperature in the discharge produced using a dc spiral hollow cathode with CH4-H2 as the feed gas have been carried out during the rowth of diamond. Optical emission from the R branch of the 3d1 Σ v-O-2p Σ v-O rotational vibronic band are used to determine a rotational temperature. Limitations of this method are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 162: Symposium F – Diamond, Silicon Carbide and Related Wide Bandgap Semiconductors , 1989 , 163
Copyright
Copyright © Materials Research Society 1990

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References

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