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Uv Excimer Laser Induced Prenucleation of Surfaces from Spin-on Films Followed by Electroless Metallization

Published online by Cambridge University Press:  25 February 2011

Hilmar Esrom ,
Georg Wahl  and
Michael Stuke
Hilmar Esrom
Affiliation:
Asea Brown Boveri, CRH, D-6900 Heidelberg, FRG
Georg Wahl
Affiliation:
Asea Brown Boveri, CRH, D-6900 Heidelberg, FRG
Michael Stuke
Affiliation:
Max-Planck-Institut f. biophys. Chemie, D-3400 Göttingen, FRG
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Abstract

UV excimer laser light-induced prenucleation of various surfaces from spin-on films in air is described. Good results were obtained using palladium acetate on substrate materials ranging from ceramics to polymers and even paper. Virtually any surface material can be prenucleated in this way. The Pd-prenucleated planar and curved surfaces can be metallized by a vast variety of metals using electroless plating solutions (Cu, Ni, Au, Pt, Co, Sn, and even alloys). Results are described in detail for copper from a standard electroless solution (Doduco or Shipley). Contact metallization through via holes using this process was aachieved with excellent contact properties.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 131: Symposium E – Chemical Perspectives of Microelectronic Materials I , 1988 , 581
Copyright
Copyright © Materials Research Society 1989

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References

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