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Optical and Dielectric Properties of Eu- and Y-Polytantalate Thin Films

Published online by Cambridge University Press:  01 February 2011

Vladimir Vasilyev ,
Alvin Drehman ,
Helen Dauplaise ,
Lionel Bouthillette  and
Alex Volinsky
Vladimir Vasilyev
Affiliation:
Air Force Research Laboratory, Sensors Directorate, Hanscom AFB, MA, Mark Roland, Solid State Scientific Corp., Hollis, NH
Alvin Drehman
Affiliation:
Air Force Research Laboratory, Sensors Directorate, Hanscom AFB, MA, Mark Roland, Solid State Scientific Corp., Hollis, NH
Helen Dauplaise
Affiliation:
Air Force Research Laboratory, Sensors Directorate, Hanscom AFB, MA, Mark Roland, Solid State Scientific Corp., Hollis, NH
Lionel Bouthillette
Affiliation:
Air Force Research Laboratory, Sensors Directorate, Hanscom AFB, MA, Mark Roland, Solid State Scientific Corp., Hollis, NH
Alex Volinsky
Affiliation:
University of South Florida, Department of Mechanical Engineering, Tampa, FL Stefan Zollner, Wentao Qin, Motorola, Inc. Advanced Products R&D Laboratory MD EL622, Tempe, AZ
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Abstract

Due to their highly efficient photo-luminescent (PL) characteristics, the physical properties of rare-earth polytantalates, RETa7O19 (RE=Eu and Y) were further studied. AFM, SEM, HRTEM, x-ray reflectometry, spectroscopic ellipsometry and standard dielectric testing were used to determine film thickness, roughness, index of refraction, band-gap, dielectric constant, leakage current and breakdown field for as-deposited (amorphous) and post-annealed (crystalline) films. Structural and morphological properties of the Film/SiO2/Si interfaces were also examined.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 786: Symposium E – Fundamentals of Novel Oxide/Semiconductor Interfaces , 2003 , E3.31
Copyright
Copyright © Materials Research Society 2004

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References

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