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Investigation of Oxide/Metal Multilayers for Soft X-Ray Optics Fabricated by Ion Beam Sputterinc

Published online by Cambridge University Press:  25 February 2011

I. Kataoka ,
T. Yoneiitsu ,
K. Sekine ,
I. Yaiada ,
K. Etoh ,
K. Ito  and
N. Hoshi
I. Kataoka
Affiliation:
Japan Aviation Electronics Industry, Ltd., 1-1, Musashino 3-choie, Akishiia-shi, Tokyo, 196 Japan
T. Yoneiitsu
Affiliation:
Japan Aviation Electronics Industry, Ltd., 1-1, Musashino 3-choie, Akishiia-shi, Tokyo, 196 Japan
K. Sekine
Affiliation:
Japan Aviation Electronics Industry, Ltd., 1-1, Musashino 3-choie, Akishiia-shi, Tokyo, 196 Japan
I. Yaiada
Affiliation:
Japan Aviation Electronics Industry, Ltd., 1-1, Musashino 3-choie, Akishiia-shi, Tokyo, 196 Japan
K. Etoh
Affiliation:
Japan Aviation Electronics Industry, Ltd., 1-1, Musashino 3-choie, Akishiia-shi, Tokyo, 196 Japan
K. Ito
Affiliation:
Japan Aviation Electronics Industry, Ltd., 1-1, Musashino 3-choie, Akishiia-shi, Tokyo, 196 Japan
N. Hoshi
Affiliation:
Japan Aviation Electronics Industry, Ltd., 1-1, Musashino 3-choie, Akishiia-shi, Tokyo, 196 Japan
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Abstract

The dependence of the ordering factor and surface roughness of aiorphous SiO2 and Ni filis fabricated by Dual Ion Beai Sputtering(DIBS) assisted by Ar+ ion boibardient were evaluated. The ordering factor tas defined as a quantity which shows the degree of aiorphousness froi ris value of correlation function of the RHEED pattern. The surface roughness was leasured with a Talystep systei and STM, and the data was evaluated with respect to the spatial wavelength.

For aiorphous SiO2 filis, the surface roughness is strongly correlated with the ordering factor as a parameter of the assisting Ar+ ion energy, and it depends on the fill structure. Siiilar relationship was not observed for Ni filis, because of the traced surface roughness of substrate in the energy region investigated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 157: Symposium A – Beam-Solid Interactions: Physical Phenomena , 1989 , 335
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

1 Etoh, K., Kataoka, I. and Ito, K., SPIE Proc. 1019, 154 (1988)Google Scholar
2 Kataoka, I., Yaiada, I., Etoh, K. and Ito, K., in Processing and Characterization of Materials Using Ion Beais, edited by Rehn, Lynn E., Greene, Joe and Smidt, Fred A. (Mater. Res. Soc, Proc. 128 Pittsburgh, PA 1989) pp.513–518.Google Scholar
3 Etoh, K., et al. , in preparation for publicationGoogle Scholar