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Growth mechanism and magnetic properties for the out-of-plane–oriented Nd–Fe–B films

Published online by Cambridge University Press:  23 February 2011

Qi Yao ,
Wei Liu ,
W.B. Cui ,
F. Yang ,
X.G. Zhao  and
Z.D. Zhang
Wei Liu*
Affiliation:
Shenyang National Laboratory for Materials Science, Institute of Metal Research and International Center for Materials Physic, Chinese Academy of Sciences, Shenyang 110016, People's Republic of China
Z.D. Zhang
Affiliation:
Shenyang National Laboratory for Materials Science, Institute of Metal Research and International Center for Materials Physic, Chinese Academy of Sciences, Shenyang 110016, People's Republic of China
*
a) Address all correspondence to this author. e-mail: [email protected]
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Abstract

The growth mechanism for the out-of-plane orientation of Nd–Fe–B films has been interpreted by the adparticle mobility during film growth, from the point view of the extended structure zone model. The growth mode changes sequentially from zone II to zone Ic, with the lowered thermally induced adparticle mobility on the surface as the film grows. As such, the whole Nd–Fe–B film evolves from [00l] out-of-plane orientation to more randomly out-of-plane alignment. With the growth of the out-of-plane–oriented Nd–Fe–B film, the correlation between the magnetic properties and the alignment evolution has been studied. The coercivity variation with the film growth is understood by analyzing the nucleation-dominant reversal processes for the out-of-plane–oriented Nd–Fe–B films.

Keywords

Magnetic propertiesNanostructureSputtering
Type
Articles
Information
Journal of Materials Research , Volume 24 , Issue 9 , September 2009 , pp. 2802 - 2812
Copyright
Copyright © Materials Research Society 2009

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References

1Chin, T.S.: Permanent magnet films for applications in micro-electromechanical systems. J. Magn. Magn. Mater. 209, 75 (2000).CrossRefGoogle Scholar
2Ku, W.J., Silva, F., Bernardo, J. and Freitas, P.P.: Integrated giant magnetoresistance bridge sensors with transverse permanent magnet biasing. J. Appl. Phys. 87, 5353 (2000).CrossRefGoogle Scholar
3Weller, D. and Doerner, M.F.: Extremely high-density longitudinal magnetic recording media. Annu. Rev. Mater. Sci. 30, 611 (2000).CrossRefGoogle Scholar
4Dimos, D., Chaudhari, P. and Mannhardt, J.: Superconducting transport properties of grain boundaries in YBa2Cu3O7 bicrystals. Phys. Rev. B 41, 4038 (1990).CrossRefGoogle ScholarPubMed
5Wolter, S.D., Borca-Tasciucc, D., Chend, G., Praterb, J.T. and Sitar, Z.: Processing and thermal properties of highly oriented diamond thin films. Thin Solid Films 469-470, 105 (2004).CrossRefGoogle Scholar
6Freyss, M., Stoeffler, D. and Dreyssé, H.: Noncollinear order contribution to the exchange coupling in Fe/Cr(001) superlattices. Phys. Rev. B 54, 12677 (1996).CrossRefGoogle Scholar
7Liu, Z.Y.: Effect of varying ferromagnetic anisotropy on exchange-bias in [Pt/CO](3)/NiO(11 Å) multilayers. J. Magn. Magn. Mater. 281, 247 (2004).CrossRefGoogle Scholar
8Hannemann, U., Fähler, S., Neu, V., Holzapfel, B. and Schultz, L.: Intrinsic and extrinsic properties of epitaxial Nd2Fe14B films. Appl. Phys. Lett. 82, 3710 (2003).CrossRefGoogle Scholar
9Parhofer, S., Kuhrt, C., Wecker, J., Gieres, G. and Schultz, L.: Magnetic properties and growth texture of high-coercive Nd–Fe– B thin films. J. Appl. Phys. 83, 2735 (1998).CrossRefGoogle Scholar
10Neu, V., Melcher, S., Hannemann, U., Fahler, S. and Schultz, L.: Growth, microstructure, and magnetic properties of highly textured and highly coercive Nd–Fe–B films. Phys. Rev. B 70, 144418 (2004).CrossRefGoogle Scholar
11Chen, S.L., Liu, W., Chen, C.L. and Zhang, Z.D.: Effects of buffer layer and substrate temperature on the surface morphology, the domain structure and magnetic properties of c-axis-oriented Nd2Fe14B films. J. Appl. Phys. 98, 033907 (2005).CrossRefGoogle Scholar
12Chen, S.L., Liu, W., Chen, C.L. and Zhang, Z.D.: Effect of heat treatment on microstructure and magnetic properties of anisotropic Nd–Fe–B films with Mo or Ti buffer layer. J. Appl. Phys. 98, 113905 (2005).CrossRefGoogle Scholar
13Serrona, L.K.E.B., Sugimura, A., Adachi, N., Okuda, T., Ohsato, H., Sakamoto, I., Nakanishi, A., Motokawa, M., Ping, D.H. and Hono, K.: Structure and magnetic properties of high coercive NdFeB films with a perpendicular anisotropy. Appl. Phys. Lett. 82, 1751 (2003).CrossRefGoogle Scholar
14Hannemann, U., Fähler, S., Oswald, S., Holzapfel, B. and Schultz, L.: Effect of Cr and Ta buffers on hard magnetic Nd2Fe14B films. J. Magn. Magn. Mater. 242-245, 1294 (2002).CrossRefGoogle Scholar
15Jiang, H. and O'Shea, M.J.: Structure and magnetic properties of NdFeB thin films with Cr, Mo, Nb, Ta, Ti, and V buffer layers. J. Magn. Magn. Mater. 212, 59 (2000).CrossRefGoogle Scholar
16Shima, T., Kamegawa, A., Aoyagi, E., Hayasaka, Y. and Fujimori, H.: Magnetic properties and structure of Nd–Fe–B thin films with Cr and Ti underlayers. J. Magn. Magn. Mater. 177, 911 (1998).CrossRefGoogle Scholar
17Piramanayagam, S.N., Matsumoto, M. and Morisako, A.: Perpendicular magnetic anisotropy in NdFeB thin films. J. Appl. Phys. 85, 5898 (1999).CrossRefGoogle Scholar
18Chen, S.L., Liu, W. and Zhang, Z.D.: Microstructure and magnetic properties of anisotropic Nd–Fe–B thin films fabricated with different deposition rates. J. Magn. Magn. Mater. 302, 306 (2006).CrossRefGoogle Scholar
19Kim, Y.B., Kim, M.J., Yang, J.H., Ryu, K.S., Li, Y. and Kim, T.K.: Effects of Nd/Fe ratio on the microstructure and magnetic properties of NdFeB thin films. J. Magn. Magn. Mater. 234, 489 (2001).CrossRefGoogle Scholar
20Kwon, A.R., Fähler, S., Neu, V. and Schultz, L.: Effect of composition on phase formation, microstructure and magnetic properties of Nd–Fe–B thin films. J. Magn. Magn. Mater. 302, 252 (2006).CrossRefGoogle Scholar
21Parhofer, S., Gieres, G., Wecker, J. and Schultz, L.: Growth characteristics and magnetic properties of sputtered Nd–Fe–B thin films. J. Magn. Magn. Mater. 163, 32 (1996).CrossRefGoogle Scholar
22Yamashita, S., Yamasaki, J., Ikeda, M. and Iwabuchi, N.: Anisotropic Nd–Fe–B thin-film magnets for milli-size motor. J. Appl. Phys. 70, 6627 (1991).CrossRefGoogle Scholar
23Piramanayagam, S.N., Matsumoto, M. and Morisako, A.: Thickness dependence of magnetic properties of NdFeB thin films with perpendicular magnetic anisotropy. J. Magn. Magn. Mater. 212, L12 (2000).CrossRefGoogle Scholar
24Mahieu, S., Ghekiere, P., Depla, D. and Gryse, R. De: Biaxial alignment in sputter deposited thin films. Thin Solid Films 515, 1229 (2006).CrossRefGoogle Scholar
25Dempsey, N.M., Walther, A., May, F., Givord, D., Khlopkov, K. and Gutfleisch, O.: High performance hard magnetic NdFeB thick films for integration into micro-electro-mechanical systems. Appl. Phys. Lett. 90, 092509 (2007).CrossRefGoogle Scholar
26Castaldi, L., Gibbs, M.R.J. and Davies, H.A.: Effect of the substrate temperature on the properties of RE-Fe-B thin film magnets. J. Appl. Phys. 96, 5063 (2004).CrossRefGoogle Scholar
27Mahieu, S., Ghekiere, P., Wintera, G. De, Heirwegha, S., Deplaa, D., Grysea, R. De, Lebedevb, O.I. and Tendeloo, G. Van: Mechanism of preferential orientation in sputter deposited titanium nitride and yttria-stabilized zirconia layers. J. Cryst. Growth 279, 100 (2005).CrossRefGoogle Scholar
28Araki, T., Nakanishi, T. and Umemura, T.: Texture of Nd–Fe–B thin films prepared by magnetron sputtering. J. Appl. Phys. 85, 4877 (1999).CrossRefGoogle Scholar
29Thorton, J.A.: High rate thick film growth. Annu. Rev. Mater. Sci. 7, 239 (1977).CrossRefGoogle Scholar
30Castaldi, L., Gibbs, M.R.J. and Davies, H.A.: Deposition of hard magnetic rare-earth-Fe-B thin films by magnetron sputtering. J. Appl. Phys. 93, 9165 (2003).CrossRefGoogle Scholar
31Cadieu, F.J., Cheung, T.D., Wickramasekara, L. and Kamprath, N.: High iHc perpendicular anisotropy Nd–Fe–B sputtered films. IEEE Trans. Magn. 22, 752 (1986).CrossRefGoogle Scholar
32Zhang, H.W., Zhang, S.Y. and Shen, B.G.: Magnetic viscosity and coercivity analysis in nanocrystalline Sm2Fe15Si2C ribbons. Phys. Rev. B 62, 8642 (2000).CrossRefGoogle Scholar
33Kneller, E.F. and Hawig, R.: The exchange-spring magnet: A new material principle for permanent magnets. IEEE Trans. Magn. 27, 3588 (1991).CrossRefGoogle Scholar